Poly Silicon
To purify silicon, various methods are used. These methods are divided into two categories in general:
⦁ Metallurgical methods
⦁ Chemical methods
First method cannot take the separation process to the intended amount in terms of omitting the impurities related to phosphorus and boron but if some process corrections are made, we can expect 6N purity. Metallurgical methods are consisted of a number of melting and freezing stage operations and no chemical substance is used.
Second method, which reaches the intended purity through chemical reactions and numerous separating processes, performs much more successfully in omitting impurities in particular impurities related to boron and phosphorus. In chemical methods, pure silicon is obtained through chemical reactions and they can be divided into two categories:
⦁ Hydrogen decomposition or reduction of silane compounds
⦁ Hydrogen decomposition or reduction of silicon tetrahalides
First category methods create different silane compounds using different and consecutive reactions. Given the number of chlorine and hydrogen existing in their structures, the following five compounds can be used for producing pure silicon as well:
⦁ Monosilane (SiH4)
⦁ Chlorosilane (SiH3Cl)
⦁ Dichlorosilane (SiH2Cl2)
⦁ Trichlorosilane (SiHCl3)
⦁ Tetrachlorosillane or silicon tetrachloride (SiCl4)